Silicon Wafers Vacuum Components Pacific Rim Manufacturing Advantec Co. Ltd. Japan Advantiv Technologies
bare silicon wafers
Bare Wafers
blanket film test wafers
Blanket Films
patterned test wafers
Patterned Wafers
other silicon wafers
Other Wafers
solar materials
Solar Materials

Wafer Metrology and Inspection Services

300mm SP-1 Scan  
  • Comprehensive Equipment Set – Full range of available services for defect characterization, and film thickness measurement

  • Industry Expertise – We specialize in semiconductor wafer applications. All materials are handled in compliance with rigorous cleanroom protocols.

  • Full Service – Free local pickup and delivery available.

Defect Characterization and Analytical Services

  • Unpatterned Wafer Defect Detection with KLA-Tencor Surfscan SP-1 and SP-2
    –  200mm and 300mm diameter capability
    –  Particle Measurement on bare silicon and films
    –  Wafer pre-scanning and post-scanning services
    –  Custom recipe development available

  • Scanning Electron Microscopy (SEM)
    –  Hitachi 4800 Field Emission SEM
    –  Applied Materials SEMVision Defect Review System
    –  Zeiss 200mm Tungsten Filament SEM

  • Other High Resolution Imaging
    –  Transmission Electron Microscopy (TEM)
    –  Field Emission Transmission Electron Microscopy (FTEM)
    –  Scanning Transmission Electron Microscopy (STEM)
    –  Focused Ion Beam (FIB)
    –  Neutron Activation (NAA)
    –  Electron Energy Loss Spectroscopy (EELS)

  • Surface Analysis Services
    –  Energy Dispersive X-Ray Spectroscopy (EDX / EDS)
    –  Scanning Auger Microscopy (SAM)
    –  Atomic Force Microscopy (AFM)
    –  Auger Electron Spectroscopy (AES)
    –  Dynamic Secondary Mass Spectroscopy (SIMS)
    –  Quadruple Secondary Mass Spectroscopy (SIMS)
    –  Time-of-Flight Mass Spectroscopy (TOF-SIMS)
    –  Electron Spectroscopy for Chemical Analysis (ESCA or XPS)
    –  X-Ray Diffraction (XRD)
    –  Rutherford Back Scattering (RBS)
    –  X-Ray Reflection (XRR)
    –  X-Ray Diffractions (XRD)
    –  Micro-Raman - Visible & UV

  • Analytical Chemistry Services
    –  Ion Chromatography (IC)
    –  Inductively Coupled Plasma Mass Spectroscopy (ICP-MS)
    –  Vapor Phase Deposition (VPD)
    –  Gas Chromatography Mass Spectrometry (GC-MS)
    –  Titration
    –  Inductively Coupled Plasma Optical Emission (ICP-OES)
    –  Fourier Transform Infrared Spectroscopy (FTIR)
    –  Assay

  • Other Analysis Services Available on Request

Film Thickness Measurment Services

  • Variety of Film Thickness Measurment services available
    –  Rudolph MetaPulse
    –  Ellipsometry
    –  Other methods available on request

Check with us for more information on wafer metrology and inspection services!

Wafer Metrology and Inspection Information

Particle Measurement Services using KLA-Tencor Surfscan SP-1 and SP-2
Visit us again soon for more information on unpatterned wafer defect inspection technology!

Advantiv Technologies, Inc. · 48890 Milmont Drive, Suite 104-D · Fremont, CA 94538 · Tel: 510-490-8260 · Email:
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