Vacuum Components Pacific Rim Manufacturing Advantec Co. Ltd. Japan Advantiv Technologies
bare silicon wafers
Bare Wafers
blanket film test wafers
Blanket Films
patterned test wafers
Patterned Wafers
solar, quartz and other wafers
Other Wafers


Wafer Metrology and Inspection Services

300mm SP-1 Scan  
  • Comprehensive Equipment Set – Full range of available services for defect characterization, and film thickness measurement

  • Industry Expertise – We specialize in semiconductor wafer applications. All materials are handled in compliance with rigorous cleanroom protocols.

  • Full Service – Free local pickup and delivery available.


Defect Characterization Analysis Services

  • Unpatterned Wafer Defect Detection with KLA-Tencor Surfscan SP-1 and SP-2
    –  200mm and 300mm diameter capability
    –  Particle Measurement on bare silicon and films
    –  Wafer pre-scanning and post-scanning services
    –  Custom recipe development available

  • Scanning Electron Microscopy (SEM)
    –  Hitachi 4800 Field Emission SEM
    –  Applied Materials SEMVision Defect Review System
    –  Zeiss 200mm Tungsten Filament SEM

  • Other Particle and Defect Analysis Services
    –  Energy Dispersive X-Ray Spectroscopy (EDX / EDS)
    –  Scanning Auger Microscopy (SAM)
    –  Atomic Force Microscopy (AFM)
    –  Focused Ion Beam (FIB)
    –  Other Analysis Services Available on request

Film Thickness Measurment Services

  • Variety of Film Thickness Measurment services available
    –  Rudolph MetaPulse
    –  Ellipsometry
    –  Other methods available on request

Check with us for more information on wafer metrology and inspection services!



Wafer Metrology and Inspection Information

Particle Measurement Services using KLA-Tencor Surfscan SP-1 and SP-2
Visit us again soon for more information on unpatterned wafer defect inspection technology!

Advantiv Technologies, Inc. · 48890 Milmont Drive, Suite 104-D · Fremont, CA 94538 · Tel: 510-490-8260 · Email: sales@AdvantivTech.com
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