|
 |
Quartz Wafers and Substrates
 |
|
- High Quality – These synthetic quartz glass substrates are manufactured in Japan. High purity of the quartz provides excellent cleanliness. The material is very stable against a variety of solvents and provides excellent dimensional stability over a wide temperature range. Average surface roughness of this synthetic quartz glass is 0.3nm.
- Wide Selection – Circular, Rectangular and Square quartz substrates for a wide variety of applications
|
Featured Quartz Wafer Products
- 300mm Quartz Wafers
– Synthetic Quartz Substrate
– 300mm diameter ± 0.25mm with SEMI Standard Notch
– Quartz Wafer Thickness 1.200mm ± 0.020mm
– Average Surface Roughness ≤ 0.3nm
– Quartz Optical Transmissivity > 90% at wavelengths between 200nm - 600nm
– Available as bare quartz, or with Chromium film.
- 200mm Quartz Wafers
– Synthetic Quartz Substrate
– 200mm diameter ± 0.25mm with Flat or SEMI Standard Notch
– Quartz Wafer Thickness 0.725mm ± 0.020mm
– Average Surface Roughness ≤ 0.3nm
– Quartz Optical Transmissivity > 90% at wavelengths between 200nm - 600nm
– Available as bare quartz, or with Chromium film.
- Other Quartz Wafers
| Diameter |
Tolerance |
Thickness |
Tolerance |
| 150mm |
± 0.25mm |
0.625mm |
± 0.020mm |
| 150mm |
± 0.25mm |
0.675mm |
± 0.020mm |
| 150mm |
± 0.25mm |
0.800mm |
± 0.020mm |
| 125mm |
± 0.25mm |
0.550mm |
± 0.020mm |
| 125mm |
± 0.25mm |
0.625mm |
± 0.020mm |
| 125mm |
± 0.25mm |
1.100mm |
± 0.020mm |
| 100mm |
± 0.25mm |
0.525mm |
± 0.020mm |
| 100mm |
± 0.25mm |
1.000mm |
± 0.020mm |
| 76.2mm |
± 0.25mm |
0.525mm |
± 0.020mm |
| 76.2mm |
± 0.25mm |
1.000mm |
± 0.020mm |
- Square Quartz Photomask Substrates
– Wide selection of sizes ranging from 63.1 x 63.1mm to 200mm x 200mm
– Quartz thickness ranging from 1.50mm ± 0.10mm to 3.05mm ± 0.10mm
– Front Side Flatness specifications ranging from 5μm to 10μm
– Available as bare quartz or with Chromium film
Check with us for synthetic quartz wafer substrates
Quartz Wafers from Japan
Quartz Wafer Applications
Quartz wafers are used for many applications, including wafer substrates for semiconductor fabrication, photomask substrates for photolithography, poly-Si-TFT substrates for LCD's, micro lens substrates for LCD's and fiber optics, substrates for Radio Frequency (RF) applications, microfluidic substrates and DNA chip substrates.
Quartz Wafer Mechanical Properties
Manufactured in Japan, these quartz wafers are of extremely high purity and low contamination. Impurity levels are less than one part per billion for most metals and less than 0.1 part per billion for Arsenic and Uranium.
The quartz wafers have excellent chemical resistance with high stability against a variety of solvents. They also have excellent heat resistance with high dimensional stability over a wide temperature range.
| Element | Impurities
(in ppb) |
| Al | <1 |
| As | <0.1 |
| B | <1 |
| Ca | <1 |
| Cd | <1 |
| Cr | <1 |
| Cu | <1 |
| Fe | <1 |
| K | <1 |
| Li | <1 |
| Mg | <1 |
| Mn | <1 |
| Na | <1 |
| Ni | <1 |
| P | <1 |
| Ti | <1 |
| Zr | <1 |
Quartz Wafer Optical Properties
Optically, the material has high transmissivity over a wide range of wavelengths from UV to IR. The synthetic quartz wafers have over 90% transmissivity for wavelengths of light between 200nm to 600nm.
The optical transmission performance is far superior to that of fused quartz wafers, which drop significantly below 90% at wavelengths less than 275nm.
These synthetic quartz wafers also display no flourescence over a wide range of wavelengths from UV to IR.
Other Quartz Products Available
For more information on products not listed, please contact Advantiv Technologies.
|
|
