Low Haze, 300mm Bare Silicon Test Monitor Wafers
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| Typical Haze Levels |
|
60 - 100 ppb. |
| Typical Particles |
|
<100 at greater than or equal to 0.065 μm |
| Conductivity Type |
|
P type – Boron Doped |
| Orientation |
|
<100> |
| Growth Method |
|
MCZ |
| Diameter |
|
299.80 – 300.20 mm |
| Center Thickness |
|
750.0 – 800.0 μm |
| GBIR |
|
<5.0 μm |
| CZ Resistivity |
|
1.000 – 100.000 Ω−cm |
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Low Haze, 200mm Bare Silicon Test Monitor Wafers
| Typical Haze Levels |
|
95 - 105 ppb. |
| Typical Particles |
|
<50 at greater than or equal to 0.065 μm |
| Conductivity Type |
|
P type – Boron Doped |
| Orientation |
|
<100> |
| Growth Method |
|
CZ |
| Diameter |
|
199.80 – 200.20 mm |
| Center Thickness |
|
700.0 – 750.0 μm |
| CZ Resistivity |
|
1.000 – 100.000 Ω−cm |
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Click here for more information on Ultra-Low Particle Test Wafers.
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