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Test Wafers with Spin On Glass (SOG) and Spin On Dielectric (SOD)
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- Wide Variety of Standard Spin Coated Products
- Choose the One Best Suited for your Development Application – Select from different standard products for optimization of planarization, gap fill, K-value or other process parameters.
- Custom Solutions Available – We can provide custom thicknesses for your unique requirements.
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Standard Spin On Glass (SOG) Test Wafer Products
| Attribute |
Available Choices |
| Material |
Methylsiloxane |
| Organic Content |
Ranging from 10 – 14% |
| Film Thickness |
1kÅ – 10kÅ, Others Available on Request |
| Dielectric Constant |
approximately 3.2 – 3.8 |
Standard Spin On Dielectric (SOD) Test Wafer Products
| Attribute |
Available Choices |
| Material |
Phosposilicate |
| Organic Content |
0% |
| Film Thickness |
1kÅ – 1.6kÅ, Others Available on Request |
| Dielectric Constant |
approximately 3.9 – 4.5 |
Spin On Glass (SOG) and Spin on Dielectric (SOD) Configurations
- Provided with 200mm diameter silicon wafers
- Available as films on customer provided silicon
- Spin coated films can be deposited on customer provided patterned wafers
- SOG and SOD are also available in smaller wafer diameters
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Check with us for Spin On Glass (SOG) and Spin On Dielectric (SOD) Products
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