Test Wafers Vacuum Exhaust Components Pacific Rim Manufacturing Advantiv Technologies Advantiv and Advantec Co. Ltd., Japan
sputtering targets
Sputtering Targets
vacuum evaporation materials
Evaporation Materials
vacuum exhaust components
Exhaust
Fittings
valves
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Sputtering Targets

Sputtering Targets  
  • High Quality – Manufactured by Canon

  • Comprehensive Selection – Full line of sputtering targets.
    – High purity metals and alloys
    – Oxide and fluoride targets
    – Transparent and anti-reflective coatings
    – Conductive and Insulating films
    – Flat and rotatable configurations

  • Solar and Thin Films – Specialized sputtering materials for Solar, Thin Film Applications


AZO Sputtering Target
AZO		   Silicon Sputtering Target
Si		   Silicon Dioxide Sputtering Target
SiO2		  
  • Oxide Sputtering Targets

    Material Formula Purity Application
    AZO
    Aluminum Doped Zinc Oxide    		 ZnO+Al2O3 ≈ 99.99% Transparent Conductive Films for Solar Cells and Displays
    GZO
    Galium Doped Zinc Oxide    		 ZnO+Ga2O3 ≈ 99.99% Transparent Conductive Films for Solar Cells and Displays
    ZnO
    Zinc Oxide    		 ZnO ≈ 99.99% Transparent Conductive Films for Solar Cells
    ItO
    Indium Tin Oxide    		 In2O3+SnO2 ≈ 99.99% Transparent Conductive Films for Solar Cells
    SiO2
    Silicon Dioxide    		 SiO2 ≈ 99.99% Antireflective and
    Insulating Films
    Al2O3
    Aluminum Oxide    		 Al2O3 ≈ 99.99% Antireflective and
    Insulating Films
    TiO2
    Titanium Dioxide    		 TiO2 ≈ 99.99% Antireflective, Insulating
    and Photocatalytic Films
    ZrO2
    Zirconium Dioxide    		 ZrO2 ≈ 99.99% Antireflective and
    Insulating Films
    MgO
    Magnesium Oxide    		 MgO ≈ 99.99% Antireflective and
    Insulating Films


  • Fluoride Sputtering Targets

    Material Formula Purity Application
    CaF2
    Calcium Fluoride    		     CaF2     ≈ 99.99% Antireflective and
    Insulating Films
    MgF2
    Magnesium Fluoride    		 MgF2 ≈ 99.99% Antireflective and
    Insulating Films


  • Metal and Alloy Sputtering Targets

    Material Formula Purity Application
    Aluminum /
    Al Alloy    		 Al ≈ 99.999% Electrodes and
    Reflective Coatings
    Chromium /
    Cr Alloy    		 Cr ≈ 99.999% Electrodes and
    Reflective Coatings
    Nickel /
    Ni Alloy    		 Ni ≈ 99.999% Electrodes and
    Reflective Coatings
    Copper /
    Cu Alloy    		 Cu ≈ 99.999% Electrodes and
    Reflective Coatings
    Molybdenum /
    Mo Alloy    		 Mo ≈ 99.99% Electrodes and
    Reflective Coatings
    Tantalum /
    Ta Alloy    		 Ta ≈ 99.99% Electrodes and
    Reflective Coatings
    Silicon /
    Si Alloy    		 Si ≈ 99.9999% Electrodes and
    Reflective Coatings
    Siver /
    Silver Alloy    		 Ag ≈ 99.99% Electrodes and
    Reflective Coatings
    Platinum /
    Pt Alloy    		 Pt ≈ 99.99% Electrodes and
    Reflective Coatings
    Gold /
    Gold Alloy    		 Au ≈ 99.99% Electrodes and
    Reflective Coatings
Advantiv Technologies, Inc. · 48890 Milmont Drive, Suite 104-D · Fremont, CA 94538 · Tel: 510-490-8260 · Email: sales@AdvantivTech.com
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